| Component: (Network and Table) | |
|---|---|
| Network | 00500 - Statement - Consolidated Statements of Cash Flow (http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlow)  | 
| Table | (Implied) | 
| Reporting Entity [Axis] | 0001113232 (http://www.sec.gov/CIK) | 
| Consolidated Statements of Cash Flow | Period [Axis] | ||
|---|---|---|---|
2016-01-01 - 2016-12-31  | 2015-01-01 - 2015-12-31  | 2014-01-01 - 2014-12-31  | |
Consolidated Statements of Cash Flow  | |||
Cash flows from operating activities  | |||
Net income  | 11,001,000    | 14,678,000    | (11,266,000)   | 
Adjustments to reconcile net income to net cash (used in) provided by operating activities:  | |||
Depreciation and amortization  | |||
Gain on sale of equipment  | (  | ||
Deferred taxes  | |||
Stock-based compensation expense  | |||
Provision for doubtful accounts  | |||
Provision for excess and obsolete inventory  | |||
Changes in operating assets & liabilities:  | |||
Accounts receivable  | (  | (  | |
Inventories  | (  | (  | (  | 
Prepaid expenses and other current assets  | (  | (  | |
Accounts payable and other current liabilities  | |||
Deferred revenue  | |||
Income taxes  | (  | (  | |
Other assets and liabilities  | (  | (  | |
Net cash (used in) provided by operating activities  | (  | (  | |
Cash flows from investing activities  | |||
Proceeds from sale of equipment  | |||
Expenditures for property, plant, and equipment  | (  | (  | (  | 
Net cash used in investing activities  | (  | (  | (  | 
Cash flows from financing activities  | |||
Decrease in restricted cash  | (  | ||
Financing fees and other expenses  | (  | (  | (  | 
Proceeds from exercise of stock options  | |||
Proceeds from Employee Stock Purchase Plan  | |||
Principal payments on sale leaseback obligation  | (  | ||
Proceeds from financing obligations  | |||
Principal payments on Term Loan  | (  | (  | |
Net cash provided by financing activities  | |||
Effect of exchange rate changes on cash and cash equivalents  | (  | ||
Net (decrease) increase in cash and cash equivalents  | (  | (  | |
Cash and cash equivalents at beginning of period  | 78,889,000    | ||
Cash and cash equivalents at end of period  | 70,791,000    | 78,889,000    | 30,753,000    | 
Supplemental disclosure of cash flow information  | |||
Cash paid for Income taxes  | |||
Cash paid for Interest  | |||
Supplemental disclosure of total cash, cash equivalents and restricted cash:  | |||
Cash and cash equivalents at end of period  | 70,791,000    | 78,889,000    | 30,753,000    | 
Restricted cash at end of period  | |||
Total cash, cash equivalents and restricted cash at end of period  | |||